METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

C. C. Abele; D. Kane; J. G. Eden

METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

C. C. Abele, D. Kane, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.

Original language	English (US)
Pages	286
Number of pages	1
State	Published - 1985

ASJC Scopus subject areas

Engineering(all)

Library availability

Discover UIUC Full Text

Cite this

@conference{c8e7d949a0df4b1b859204bf414f0b99,

title = "METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.",

abstract = "Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.",

author = "Abele, {C. C.} and D. Kane and Eden, {J. G.}",

year = "1985",

language = "English (US)",

pages = "286",

}

TY - CONF

T1 - METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

AU - Abele, C. C.

AU - Kane, D.

AU - Eden, J. G.

PY - 1985

Y1 - 1985

N2 - Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.

AB - Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.

UR - http://www.scopus.com/inward/record.url?scp=0022327219&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022327219&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0022327219

SP - 286

ER -

METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

Abstract

ASJC Scopus subject areas

Library availability

Related links

Fingerprint

Cite this