METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

C. C. Abele, D. Kane, J. G. Eden

Research output: Contribution to conferencePaper

Abstract

Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.

Original languageEnglish (US)
Number of pages1
StatePublished - Dec 1 1985

ASJC Scopus subject areas

  • Engineering(all)

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