METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS.

C. C. Abele, D. Kane, James Gary Eden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Summary form only given. The visible multiphoton (MPI) spectra of the column IIIA alkyls were recently shown by S. A. Mitchell and P. A. Hackett (1983) to be dominated by the three-photon spectrum of the particular metal atom involved. The successful application of this observation to the growth of thin aluminum and gallium films on GaAs at room temperature is reported. Extensive measurements of the laser intensity dependence of the ion production rate confirm the multiphoton nature of the process.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
PublisherIEEE
Pages286
Number of pages1
StatePublished - 1985

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Abele, C. C., Kane, D., & Eden, J. G. (1985). METAL FILMS ON GAAS BY MULTIPHOTON IONIZATION OF COLUMN III ALKYLS. In Unknown Host Publication Title (pp. 286). IEEE.