Metal complexes for depositing films and method of making and using the same

Gregory S Girolami (Inventor), Sumeng Liu (Inventor)

Research output: Patent

Abstract

Provided herein are metal-ligand complexes, and associated methods, characterized by formula MLxDy; wherein: M is a metal; x is equal to the oxidation state of M; each D is independently a neutral coordinating ligand; y is zero or an integer selected from the range of 1 to 4; and each L is independently a mono-anionic ligand. L may be a η1,η2-β,β-disubstituted-ω-alkenyl ligand.
Original languageEnglish (US)
U.S. patent number11008353
StatePublished - May 18 2021

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