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Metal-assisted chemical etch porous silicon formation method
Jonathan V Sweedler (Inventor), Paul W Bohn (Inventor), Xiuling Li (Inventor)
- University of Illinois Urbana-Champaign
- Bioengineering
- Center for Advanced Study
- Chemistry
- Carl R. Woese Institute for Genomic Biology
- Beckman Institute for Advanced Science and Technology
- Molecular and Integrative Physiology
- Biomedical and Translational Sciences
- Electrical and Computer Engineering
- Neuroscience Program
Research output: Patent