Abstract

The sensor and actuator properties of piezoelectric materials make them well suited for applications in a variety of microelectromechanical systems (MEMS). Simulating the response of piezoelectric devices requires solving coupled electrical and mechanical partial differential equations. In this paper, we have implemented a meshless point collocation method (PCM) to solve the governing equations. Interpolation functions are constructed from a reproducing kernel approximation, and the governing equations are discretized using a collocation approach. PCM is implemented using either a relaxation algorithm or a fully-coupled algorithm. Comparisons between the two algorithms are given. To demonstrate the performance of PCM, the behavior of two static single-layer problems and a piezoelectric bimorph have been modeled. The bimorph analysis is extended to model a prototype MEMS device.

Original languageEnglish (US)
Pages (from-to)23-36
Number of pages14
JournalComputational Mechanics
Volume27
Issue number1
DOIs
StatePublished - Jan 1 2001

ASJC Scopus subject areas

  • Computational Mechanics
  • Ocean Engineering
  • Mechanical Engineering
  • Computational Theory and Mathematics
  • Computational Mathematics
  • Applied Mathematics

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