MEMS temperature characterization by CdSe quantum dots

Sha Li, Kai Zhang, Jui Ming Yang, Liwei Lin, Haw Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1-mm long, 40-μm wide aluminum micro heater. Quantum dot emission wavelength shifts as a function of temperature was for the first time characterized at the single particle level to be 0.24 nm/°C in the 25-65 °C range. Temperature profiles of a MEMS heater under different input powers were evaluated based on the spectral shift of bulk quantum dots on the heater and were compared with a one-dimensional electrothermal model. Both experiments and simulations are consistent with variations of less than 0.8 °C. The theoretical spatial resolution of this technique can go down to the size of a single quantum dot for non-contact temperature characterizations of micro/nano structures including biological samples.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1369-1372
Number of pages4
DOIs
StatePublished - Dec 1 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • CdSe quantum dots
  • MEMS heater
  • Temperature characterization

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Li, S., Zhang, K., Yang, J. M., Lin, L., & Yang, H. (2007). MEMS temperature characterization by CdSe quantum dots. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1369-1372). [4300397] (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300397