MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han, Jagannathan Rajagopalan, M. Taher A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.

Original languageEnglish (US)
Title of host publicationMEMS/MOEMS Components and Their Applications IV
DOIs
StatePublished - May 22 2007
EventMEMS/MOEMS Components and Their Applications IV - San Jose, CA, United States
Duration: Jan 22 2007Jan 23 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6464
ISSN (Print)0277-786X

Other

OtherMEMS/MOEMS Components and Their Applications IV
CountryUnited States
CitySan Jose, CA
Period1/22/071/23/07

Fingerprint

metal films
microelectromechanical systems
MEMS
Electric properties
electrical properties
Tensile testing
mechanical properties
Mechanical properties
electrical resistivity
Testing
Metals
Transmission electron microscopy
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
tensile tests
Lithography
Etching
lithography
etching

Keywords

  • Aluminum
  • Electrical resistivity
  • In-situ uniaxial tensile
  • MEMS
  • Nanocrystalline
  • SEM
  • TEM

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Han, J. H., Rajagopalan, J., & Saif, M. T. A. (2007). MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. In MEMS/MOEMS Components and Their Applications IV [64640C] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6464). https://doi.org/10.1117/12.706115

MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. / Han, Jong H.; Rajagopalan, Jagannathan; Saif, M. Taher A.

MEMS/MOEMS Components and Their Applications IV. 2007. 64640C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6464).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Han, JH, Rajagopalan, J & Saif, MTA 2007, MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. in MEMS/MOEMS Components and Their Applications IV., 64640C, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6464, MEMS/MOEMS Components and Their Applications IV, San Jose, CA, United States, 1/22/07. https://doi.org/10.1117/12.706115
Han JH, Rajagopalan J, Saif MTA. MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. In MEMS/MOEMS Components and Their Applications IV. 2007. 64640C. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.706115
Han, Jong H. ; Rajagopalan, Jagannathan ; Saif, M. Taher A. / MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. MEMS/MOEMS Components and Their Applications IV. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).
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