MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han, Jagannathan Rajagopalan, M. Taher A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving less lithography and etching steps, and has higher sample yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and insitu tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test and electrical resistivity measurement on 100-nm-thick aluminum films, the results of which are described.

Original languageEnglish (US)
Title of host publicationMEMS/MOEMS Components and Their Applications IV
DOIs
StatePublished - May 22 2007
EventMEMS/MOEMS Components and Their Applications IV - San Jose, CA, United States
Duration: Jan 22 2007Jan 23 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6464
ISSN (Print)0277-786X

Other

OtherMEMS/MOEMS Components and Their Applications IV
CountryUnited States
CitySan Jose, CA
Period1/22/071/23/07

Keywords

  • Aluminum
  • Electrical resistivity
  • In-situ uniaxial tensile
  • MEMS
  • Nanocrystalline
  • SEM
  • TEM

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Han, J. H., Rajagopalan, J., & Saif, M. T. A. (2007). MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films. In MEMS/MOEMS Components and Their Applications IV [64640C] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6464). https://doi.org/10.1117/12.706115