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MEMS-based resonant sensor with uniform mass sensitivity
K. Park, R. Bashir
- Bioengineering
- Materials Research Lab
- Beckman Institute for Advanced Science and Technology
- Mechanical Science and Engineering
- Carl R. Woese Institute for Genomic Biology
- Molecular and Integrative Physiology
- Electrical and Computer Engineering
- National Center for Supercomputing Applications (NCSA)
- Grainger College of Engineering
- Materials Science and Engineering
- Biomedical and Translational Sciences
- Coordinated Science Lab
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution