MEMS-based resonant sensor with uniform mass sensitivity

K. Park; R. Bashir

doi:10.1109/SENSOR.2009.5285673

MEMS-based resonant sensor with uniform mass sensitivity

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensor. Most of these sensors have utilized a cantilever structure, and these cantilever resonant mass sensors have a spatially non-uniform mass sensitivity. In this study, a silicon MEMS-based resonant mass sensor with a spatially uniform mass sensitivity is developed. The sensor is composed of a platform for the target attachment and four half-folded springs. The novel structure generates a vertical displacement of the platform, which leads to the uniform mass sensitivity. The extracted mass of a same bead on different places shows a standard deviation of 1.4%.

Original language	English (US)
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1956-1958
Number of pages	3
DOIs	https://doi.org/10.1109/SENSOR.2009.5285673
State	Published - 2009
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: Jun 21 2009 → Jun 25 2009

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	6/21/09 → 6/25/09

Keywords

Resonant mass sensor
Uniform mass sensitivity

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Online availability

10.1109/SENSOR.2009.5285673

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Park, K., & Bashir, R. (2009). MEMS-based resonant sensor with uniform mass sensitivity. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1956-1958). Article 5285673 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285673

MEMS-based resonant sensor with uniform mass sensitivity. / Park, K.; Bashir, R.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1956-1958 5285673 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Park, K & Bashir, R 2009, MEMS-based resonant sensor with uniform mass sensitivity. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285673, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1956-1958, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285673

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MEMS-based resonant sensor with uniform mass sensitivity

Abstract

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Online availability

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