Abstract

MEMS-based resonant mass sensors have been extensively studied as biological and chemical sensor. Most of these sensors have utilized a cantilever structure, and these cantilever resonant mass sensors have a spatially non-uniform mass sensitivity. In this study, a silicon MEMS-based resonant mass sensor with a spatially uniform mass sensitivity is developed. The sensor is composed of a platform for the target attachment and four half-folded springs. The novel structure generates a vertical displacement of the platform, which leads to the uniform mass sensitivity. The extracted mass of a same bead on different places shows a standard deviation of 1.4%.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1956-1958
Number of pages3
DOIs
StatePublished - Dec 11 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

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Keywords

  • Resonant mass sensor
  • Uniform mass sensitivity

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Park, K., & Bashir, R. (2009). MEMS-based resonant sensor with uniform mass sensitivity. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1956-1958). [5285673] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285673