MEMS acceleration switch with bi-directionally tunable threshold

Hyunseok Kim; Yun Ho Jang; Yong Kweon Kim; Jung Mu Kim

doi:10.1016/j.sna.2014.01.003

MEMS acceleration switch with bi-directionally tunable threshold

Hyunseok Kim, Yun Ho Jang, Yong Kweon Kim, Jung Mu Kim

Research output: Contribution to journal › Article › peer-review

Abstract

A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6 × 3.1 × 0.55 mm³) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1 kHz. The threshold acceleration at no tuning voltage is 10.25 g and it is subsequently tuned to 2.0 g and 17.25 g by applying 30 V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8 ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.

Original language	English (US)
Pages (from-to)	120-129
Number of pages	10
Journal	Sensors and Actuators, A: Physical
Volume	208
DOIs	https://doi.org/10.1016/j.sna.2014.01.003
State	Published - Feb 1 2014
Externally published	Yes

Keywords

Acceleration switch
Bi-directional tuning
MEMS inertial sensor
Threshold acceleration

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Online availability

10.1016/j.sna.2014.01.003

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Cite this

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title = "MEMS acceleration switch with bi-directionally tunable threshold",

abstract = "A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6 × 3.1 × 0.55 mm3) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1 kHz. The threshold acceleration at no tuning voltage is 10.25 g and it is subsequently tuned to 2.0 g and 17.25 g by applying 30 V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8 ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.",

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AU - Kim, Hyunseok

AU - Jang, Yun Ho

AU - Kim, Yong Kweon

AU - Kim, Jung Mu

PY - 2014/2/1

Y1 - 2014/2/1

N2 - A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6 × 3.1 × 0.55 mm3) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1 kHz. The threshold acceleration at no tuning voltage is 10.25 g and it is subsequently tuned to 2.0 g and 17.25 g by applying 30 V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8 ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.

AB - A MEMS acceleration switch capable of tuning threshold acceleration to either higher or lower levels is designed and implemented with comb drive actuators as a mechanism of threshold tuning. A small sized switch (1.6 × 3.1 × 0.55 mm3) is successfully realized by patterning silicon structures on a glass wafer. The resonant frequency of fabricated switches agrees well with a designed frequency of 1.1 kHz. The threshold acceleration at no tuning voltage is 10.25 g and it is subsequently tuned to 2.0 g and 17.25 g by applying 30 V to pushing comb and pulling comb, respectively. The rising time is measured to be 9.8 ms. Additional functionalities such as safe/armed position convertibility and single use latching switch are also described for diverse applications of the tunable acceleration switches.

KW - Acceleration switch

KW - Bi-directional tuning

KW - MEMS inertial sensor

KW - Threshold acceleration

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MEMS acceleration switch with bi-directionally tunable threshold

Abstract

Keywords

ASJC Scopus subject areas

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