Mechanism of stress-induced leakage current in MOS capacitors

Keyphrases

• MOS Capacitor 100%
• Stress Induced Leakage Current 100%
• Thickness Dependence 40%
• Electric Field (E-field) 20%
• High Field 20%
• Low Field 20%
• Density Dependence 20%
• Trap-assisted Tunneling 20%
• Tunnel Oxide 20%
• Trap Density 20%
• Non-volatile Memory 20%
• Fowler-Nordheim Tunneling Current 20%

Material Science

• Density 100%
• Oxide Compound 100%
• Capacitor 100%

Earth and Planetary Sciences

• Electric Field 100%