The paper presents a new bio-MEMS sensor for in-situ force response measurement of single living cells. The sensor consists of fixed-fixed silicon beams connected by a backbone and attached to a probe. The sensor is functionalized by a coating with fibronectin. Adhesion sites are formed between the probe and a single cell by contact. The cell is stretched by the probe and the cell force response is measured from the deflection of the beams and their spring constant. Several living monkey fibroblast cells are tested as they are loaded and unloaded under large deformation. The force response is found to be linear and reversible.

Original languageEnglish (US)
Pages (from-to)265-267
Number of pages3
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
StatePublished - 2004
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: Jan 25 2004Jan 29 2004

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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