Abstract
A new method for tensile testing of thin films is being developed. An electrostatic grip apparatus was designed and implemented to measure the elastic and ultimate tensile properties (Young's modulus, Poisson's ratio and tensile strength) of surface micromachined polysilicon specimens. The tensile specimens are `dog-bone' shaped ending in a large `paddle' for electrostatic gripping. The test section of the specimens is 400 μm long and with 2 μm×50 μm cross section. The method employs Atomic Force Microscope (AFM) or Scanning Tunneling Microscope (STM) acquired surface topologies of deforming specimens to determine (fields of) strains. By way of the method of Digital Image Correlation (DIC), the natural surface roughness features are used as distributed markers. The effect of markers artificially deposited on the surface is examined computationally. Also the significance of other parameters on property measurements, such as surface roughness, has been examined computationally. Initial results obtained using the tensile test apparatus are presented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 66-75 |
| Number of pages | 10 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3512 |
| DOIs | |
| State | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 Conference on Materials and Device Characterization in Micromachining - Santa Clara, CA, USA Duration: Sep 21 1998 → Sep 22 1998 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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