TY - GEN
T1 - Mechanical properties of PZT films and their composites for RF-MEMS
AU - Yagnamurthy, S.
AU - Chasiotis, I.
AU - Lambros, J.
AU - Polcawich, R.
AU - Pulskamp, J.
AU - Dubey, M.
PY - 2008
Y1 - 2008
N2 - The mechanical response of Lead Zirconate Titanate (PZT) in thin film form has been investigated by microscale uniaxial tension experiments of PZT stacks. Due to the difficulty in fabricating individual freestanding PZT films, thin film stacks were fabricated in combinations of Silicon Oxide (SiO2), Titanium (Ti), Platinum (Pt) and PZT. The specimens tested were stacks of SiO2-TiPt-PZT-Pt, SiO2-TiPt-PZT, and individual SiO 2 and Pt thin films, with gauge lengths of 1000 microns and widths of 50-100 microns. Full-field strain measurements were conducted with the aid of a fine speckle pattern (1 μm particle size) generated on the samples and analyzed by digital image correlation. The composite mechanical properties of the PZT stacks were computed from the stress vs. strain plots, while the mechanical properties of individual PZT films were computed from those of the PZT stack and the properties of SiO2 and Pt films.
AB - The mechanical response of Lead Zirconate Titanate (PZT) in thin film form has been investigated by microscale uniaxial tension experiments of PZT stacks. Due to the difficulty in fabricating individual freestanding PZT films, thin film stacks were fabricated in combinations of Silicon Oxide (SiO2), Titanium (Ti), Platinum (Pt) and PZT. The specimens tested were stacks of SiO2-TiPt-PZT-Pt, SiO2-TiPt-PZT, and individual SiO 2 and Pt thin films, with gauge lengths of 1000 microns and widths of 50-100 microns. Full-field strain measurements were conducted with the aid of a fine speckle pattern (1 μm particle size) generated on the samples and analyzed by digital image correlation. The composite mechanical properties of the PZT stacks were computed from the stress vs. strain plots, while the mechanical properties of individual PZT films were computed from those of the PZT stack and the properties of SiO2 and Pt films.
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M3 - Conference contribution
AN - SCOPUS:58049159227
SN - 9781605604152
T3 - Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
SP - 1253
EP - 1259
BT - Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
T2 - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Y2 - 2 June 2008 through 5 June 2008
ER -