Mechanical properties of PZT films and their composites for RF-MEMS

S. Yagnamurthy, Ioannis Chasiotis, John Lambros, R. Polcawich, J. Pulskamp, M. Dubey

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The mechanical response of Lead Zirconate Titanate (PZT) in thin film form has been investigated by microscale uniaxial tension experiments of PZT stacks. Due to the difficulty in fabricating individual freestanding PZT films, thin film stacks were fabricated in combinations of Silicon Oxide (SiO2), Titanium (Ti), Platinum (Pt) and PZT. The specimens tested were stacks of SiO2-TiPt-PZT-Pt, SiO2-TiPt-PZT, and individual SiO 2 and Pt thin films, with gauge lengths of 1000 microns and widths of 50-100 microns. Full-field strain measurements were conducted with the aid of a fine speckle pattern (1 μm particle size) generated on the samples and analyzed by digital image correlation. The composite mechanical properties of the PZT stacks were computed from the stress vs. strain plots, while the mechanical properties of individual PZT films were computed from those of the PZT stack and the properties of SiO2 and Pt films.

Original languageEnglish (US)
Title of host publicationSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Pages1253-1259
Number of pages7
StatePublished - Dec 1 2008
Event11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 - Orlando, FL, United States
Duration: Jun 2 2008Jun 5 2008

Publication series

NameSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Volume3

Other

Other11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
CountryUnited States
CityOrlando, FL
Period6/2/086/5/08

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

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  • Cite this

    Yagnamurthy, S., Chasiotis, I., Lambros, J., Polcawich, R., Pulskamp, J., & Dubey, M. (2008). Mechanical properties of PZT films and their composites for RF-MEMS. In Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 (pp. 1253-1259). (Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008; Vol. 3).