Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension

M. A. Haque; M Taher A Saif

doi:10.1016/S1359-6462(02)00306-8

Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension

Research output: Contribution to journal › Article › peer-review

Abstract

We present uniaxial tensile test results for 30-50 nm thick freestanding aluminum films. Young's modulus and ductility were found to decrease monotonically with grain size. Reverse Hall-Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens.

Original language	English (US)
Pages (from-to)	863-867
Number of pages	5
Journal	Scripta Materialia
Volume	47
Issue number	12
DOIs	https://doi.org/10.1016/S1359-6462(02)00306-8
State	Published - Dec 2002

Keywords

Aluminum
MEMS
Mechanical properties
Thin films

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Metals and Alloys

Online availability

10.1016/S1359-6462(02)00306-8

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@article{6d319dbb51644c5496bda1e9370fd169,

title = "Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension",

abstract = "We present uniaxial tensile test results for 30-50 nm thick freestanding aluminum films. Young's modulus and ductility were found to decrease monotonically with grain size. Reverse Hall-Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens.",

keywords = "Aluminum, MEMS, Mechanical properties, Thin films",

author = "Haque, {M. A.} and Saif, {M Taher A}",

year = "2002",

month = dec,

doi = "10.1016/S1359-6462(02)00306-8",

language = "English (US)",

volume = "47",

pages = "863--867",

journal = "Scripta Materialia",

issn = "1359-6462",

publisher = "Acta Materialia Inc",

number = "12",

}

TY - JOUR

T1 - Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension

AU - Haque, M. A.

AU - Saif, M Taher A

PY - 2002/12

Y1 - 2002/12

N2 - We present uniaxial tensile test results for 30-50 nm thick freestanding aluminum films. Young's modulus and ductility were found to decrease monotonically with grain size. Reverse Hall-Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens.

AB - We present uniaxial tensile test results for 30-50 nm thick freestanding aluminum films. Young's modulus and ductility were found to decrease monotonically with grain size. Reverse Hall-Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens.

KW - Aluminum

KW - MEMS

KW - Mechanical properties

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=0036887933&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036887933&partnerID=8YFLogxK

U2 - 10.1016/S1359-6462(02)00306-8

DO - 10.1016/S1359-6462(02)00306-8

M3 - Article

AN - SCOPUS:0036887933

SN - 1359-6462

VL - 47

SP - 863

EP - 867

JO - Scripta Materialia

JF - Scripta Materialia

IS - 12

ER -

Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension

Abstract

Keywords

ASJC Scopus subject areas

Online availability

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