Measurements of microjet cooling and phase change characteristics using microcantilever heaters

Jungchul Lee, Hanif Hunter, Fabian Goericke, Nisarga Naik, Mark Allen, Ari Glezer, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle having 10 μm diameter. Microcantilever sensors are well-suited to interrogate these flows due to their high spatial and temporal resolution. In this work, microcantilevers with integrated piezoresistors have been used to detect the breakup distance of free microjets, and microcantilevers with integrated resistive heaters have been applied to study microjet cooling and phase change characteristics. Measured microjet thrusts were in the range of 10 - 60 μN and heat fluxes were measured in the range of 25 - 350 °C. The convective heat fluxes by microjet impingement boiling were estimated at 2.9 - 7.6 kW/cm2. The techniques reported herein are promising to characterize microscale flows.

Original languageEnglish (US)
Title of host publication2007 Proceedings of the ASME InterPack Conference, IPACK 2007
Pages163-169
Number of pages7
DOIs
StatePublished - Dec 1 2007
EventASME Electronic and Photonics Packaging Division - Vancouver, BC, United States
Duration: Jul 8 2007Jul 12 2007

Publication series

Name2007 Proceedings of the ASME InterPack Conference, IPACK 2007
Volume1

Other

OtherASME Electronic and Photonics Packaging Division
CountryUnited States
CityVancouver, BC
Period7/8/077/12/07

Keywords

  • Anemometer
  • Boiling hysteresis
  • Critical heat flux
  • Jet breakup
  • Micro/nanojets
  • Microcantilever

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Computer Science Applications
  • Information Systems

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