Abstract
An ion beam was focused onto S-65 C grade Be samples to measure the Be sputtering yield. The angular distribution of sputtered atoms and the areal density of the Be were measured. A Monte Carlo computer code predicted the angular distribution of the sputtered particles and a global sputtering coefficient. Reasonable agreement was observed between the code and the experimental values for total yield with the experimental yields somewhat lower.
Original language | English (US) |
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Pages (from-to) | 1170-1174 |
Number of pages | 5 |
Journal | Journal of Nuclear Materials |
Volume | 241-243 |
DOIs | |
State | Published - Feb 2 1997 |
Event | Proceedings of the 1996 12th International Conference on Plasma-Surface Interactions in Controlled Fusion Devices - Saint-Raphael, Fr Duration: May 20 1996 → May 24 1996 |
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- General Materials Science
- Nuclear Energy and Engineering