Keyphrases
Elastic Properties
100%
Elastic Constants
100%
Micro-electro-mechanical Systems
100%
Poisson's Ratio
100%
Tension Test
100%
Uniform Tension
100%
Nano-displacement
100%
Inverse Approach
50%
Atomic Force Microscopy Image
50%
Displacement Field
50%
Accurate Determination
50%
Micron-sized
50%
Young's Modulus
50%
Applied Load
50%
Numerical Analysis
50%
Polysilicon
50%
Free-standing Film
50%
Local Displacement
50%
Perforation
50%
Optimum Location
50%
Material Domain
50%
Elastic Modulus Ratio
50%
Inverse Solution
50%
Digital Image Correlation Analysis
50%
Nanometric Displacement
50%
Engineering
Microelectromechanical System
100%
Hole Method
100%
Elastic Constant
66%
Poisson Ratio
66%
Young's Modulus
66%
Nanoscale
33%
Thin Films
33%
Atomic Force Microscopy
33%
Problem Approach
33%
Displacement Field
33%
Digital Image Correlation
33%
Applied Load
33%
Polysilicon
33%
Inverse Solution
33%
Material Science
Microelectromechanical System
100%
Elastic Property
100%
Elastic Constant
100%
Poisson Ratio
100%
Silicon
50%
Thin Films
50%
Elastic Moduli
50%
Young's Modulus
50%
Tensile Testing
50%