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Measurement of forces and spring constants of microinstruments
M. T.A. Saif
, N. C. MacDonald
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
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Keyphrases
Actuation
12%
Actuator
87%
Applied Voltage
25%
Atomic Scale
12%
Axial Compressive Force
12%
Bar Fracture
12%
Calibration Error
12%
Calibration Scheme
12%
Comb-drive
12%
Different Voltage
12%
Elastic Modulus
12%
Force Constants
100%
High Force
12%
Integrable
12%
Interdigitated Combs
12%
Large Classes
12%
Large Distances
12%
Linear Dimensions
12%
Material Behavior
12%
Material Investigation
12%
Material Studies
12%
Microactuators
12%
Microinstruments
100%
Micromachining
12%
MicroScan
12%
Multicrystalline Silicon
12%
Non-uniformity
12%
Post-buckling Deformation
12%
Restoring Force
25%
Scanning Tunneling Microscope
12%
Silicon-based
12%
Slender Beams
12%
Spring Constant
100%
Sub-micrometer
12%
Surface Imaging
12%
Surface Modification
12%
Torsion Test
12%
Value Sensitive Design
12%
Engineering
Actuation
33%
Applicability
33%
Applied Torque
33%
Applied Voltage
66%
Buckling
100%
Compressive Force
33%
Design Value
33%
Force (F)
33%
Linear Dimension
33%
Material Behavior
33%
Restoring Force
66%
Scanning Tunneling Microscope
33%
Silicon Single Crystal
33%
Spring Constant
100%
Study Materials
66%
Young's Modulus
33%