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Measurement of forces and spring constants of microinstruments
M. T.A. Saif
, N. C. MacDonald
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
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Keyphrases
Spring Constant
100%
Force Constants
100%
Microinstruments
100%
Actuator
87%
Applied Voltage
25%
Restoring Force
25%
Multicrystalline Silicon
12%
Elastic Modulus
12%
Silicon-based
12%
Large Classes
12%
Microactuators
12%
Actuation
12%
Atomic Scale
12%
Large Distances
12%
Non-uniformity
12%
Scanning Tunneling Microscope
12%
Sub-micrometer
12%
Integrable
12%
Material Behavior
12%
Surface Modification
12%
Comb-drive
12%
Calibration Error
12%
Material Investigation
12%
Micromachining
12%
Linear Dimensions
12%
Surface Imaging
12%
Different Voltage
12%
High Force
12%
Value Sensitive Design
12%
Torsion Test
12%
Calibration Scheme
12%
Slender Beams
12%
Material Studies
12%
Axial Compressive Force
12%
Interdigitated Combs
12%
Post-buckling Deformation
12%
MicroScan
12%
Bar Fracture
12%
Engineering
Buckling
100%
Spring Constant
100%
Applied Voltage
66%
Restoring Force
66%
Study Materials
66%
Silicon Single Crystal
33%
Actuation
33%
Applicability
33%
Young's Modulus
33%
Compressive Force
33%
Material Behavior
33%
Scanning Tunneling Microscope
33%
Linear Dimension
33%
Applied Torque
33%
Design Value
33%
Force (F)
33%