Measurement of ballistic phonon conduction near hotspots in silicon

P. G. Sverdrup, S. Sinha, M. Asheghi, S. Uma, K. E. Goodson

Research output: Contribution to journalArticle

Abstract

The Fourier law for lattice heat conduction fails when the source of heat is small compared to the phonon mean free path. We provide experimental evidence for this effect using heating and electrical-resistance thermometry along a doped region in a suspended silicon membrane. The data are consistent with a closed-form two-fluid phonon conduction model, which accounts for the severe departure from equilibrium at the hotspot. The temperature rise exceeds predictions based on the Fourier law by 60% when the phonon mean free path is a factor of 30 larger than the resistor thickness. This work is improving the constitutive modeling of heat flow in deep-submicron transistors.

Original languageEnglish (US)
Pages (from-to)3331-3333
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number21
DOIs
StatePublished - May 21 2001
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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