MEASUREMENT AND USE OF THE PLASMA CURRENT WAVEFORM IN AN RF SILANE DISCHARGE.

Earl R. Mosburg, Ralph Kerns, John Abelson

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish (US)
Pages410-413
Number of pages4
StatePublished - Dec 1 1982
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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