MEASUREMENT AND USE OF THE PLASMA CURRENT WAVEFORM IN AN RF SILANE DISCHARGE.

Earl R. Mosburg, Ralph Kerns, John Abelson

Research output: Contribution to conference › Paper › peer-review

ASJC Scopus subject areas

TY - CONF

T1 - MEASUREMENT AND USE OF THE PLASMA CURRENT WAVEFORM IN AN RF SILANE DISCHARGE.

AU - Mosburg, Earl R.

AU - Kerns, Ralph

AU - Abelson, John

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=0020269314&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020269314&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0020269314

SP - 410

EP - 413

ER -