@inproceedings{95b1ae767cc84fb3ad094e2e83796467,
title = "Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy",
abstract = "We describe the design, fabrication and testing of mass-loaded cantilevers for electron-spin magnetic resonance force microscopy. These single-crystal silicon cantilevers are designed to have large gaps in their thermal mode spectra so as to reduce thermal noise near the electron-spin Rabi frequency. Each cantilever typically consists of a 2 μm thick mass suspended at the end of a 0.1 μm thick hinge. The fabrication process starts with an SOI wafer followed by selective silicon epitaxy, cantilever patterning, and backside release. The focus of the process is on precise thickness control and material homogeneity. We will present characterization results for these cantilevers at room and low temperatures and discuss the impact of these devices on magnetic resonance force microscopy measurements.",
keywords = "Electron microscopy, Fabrication, Force measurement, Frequency, Magnetic force microscopy, Magnetic noise, Magnetic resonance, Noise reduction, Silicon, Testing",
author = "Chui, {B. W.} and Y. Hishinuma and R. Budakian and Mamin, {H. J.} and Kenny, {T. W.} and D. Rugar",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1216966",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1120--1123",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
}