Maskless etching of silicon using patterned microdischarges

R. M. Sankaran, K. P. Giapis

Research output: Contribution to journalArticlepeer-review


Microdischarges in flexible copper-polyimide structures with hole diameters of 200 μm have been used as stencil masks to pattern bare silicon in CF4/Ar chemistry. The discharges were operated at 20 Torr using the substrate as the cathode, achieving etch rates greater than 7 μm/min. Optical emission spectroscopy provides evidence of excited fluorine atoms. The etch profiles show a peculiar shape attributed to plasma expansion into the etched void. Forming discharges in multiple hole and line shapes permits direct pattern transfer in silicon and could be an alternative to ultrasonic milling and laser drilling.

Original languageEnglish (US)
Pages (from-to)593-595
Number of pages3
JournalApplied Physics Letters
Issue number5
StatePublished - Jul 30 2001
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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