Manipulation of carrier concentration, crystallite size and density in polycrystalline anatase TiO2via amorphous-phase medium range atomic order

D. Eitan Barlaz, Edmund G Seebauer

Research output: Contribution to journalArticle

Abstract

Thin-film semiconducting anatase TiO2 finds several applications, including photocatalysis, wherein control over carrier concentration and other material properties would be useful. The present work employs atomic layer deposition to fabricate thin amorphous films of TiO2, which are then annealed into polycrystalline anatase. Variations in the temperature and growth rate for deposition, as well as in the ramp rate and final temperature employed during the annealing, propagate into changes in one or more of the final carrier concentration, crystallite size and bulk density. Many of these surprising findings can be interpreted in terms of medium range atomic order existing in the initial amorphous films, and demonstrate that the order can be manipulated and exploited to some degree.

Original languageEnglish (US)
Pages (from-to)2101-2109
Number of pages9
JournalCrystEngComm
Volume17
Issue number10
DOIs
StatePublished - Mar 14 2015

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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