Low voltage microcavity plasma device and addressable arrays

Seung Hoon Sung (Inventor), James Gary Eden (Inventor), Sung-Jin Park (Inventor)

Research output: Patent

Abstract

Microcavity plasma devices and arrays of microcavity plasma devices are provided that have a reduced excitation voltage. A trigger electrode disposed proximate to a microcavity reduce the excitation voltage required between first and second electrodes to ignite a plasma in the microcavity when gas(es) or vapor(s) (or combinations thereof) are contained within the microcavity. The invention also provides symmetrical microplasma devices and arrays of microcavity plasma devices for which current waveforms are the same for each half-cycle of the voltage driving waveform. Additionally, the invention also provides devices that have standoff portions and voids that can reduce cross talk. The devices are preferably also used with a trigger electrode.
Original languageEnglish (US)
U.S. patent number7615926
Filing date6/12/07
StatePublished - Nov 10 2009

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