Low temperature plasma for tunable resonant attenuation

Abbas Semnani, Hee Jun Yang, Michael Sinanis, Sung Jin Park, J. Gary Eden, Sergey O. Macheret, Dimitrios Peroulis

Research output: Chapter in Book/Report/Conference proceedingConference contribution


A cold-plasma-based technique for tuning an evanescent-mode cavity resonator is introduced and studied experimentally for the first time in this paper. The technique involves a plasma jet that constitutes a variable resistance integrated in the cavity. The electron density and consequently the electromagnetic properties of plasma, including its resistivity, are controlled by varying the magnitude of the sinusoidal excitation voltage. The transmission coefficient of the two-port fabricated resonator at 2.735 GHz exhibits 11 dB tunability when the magnitude of the 20-kHz plasma-excitation voltage increases from zero to 5.26 kV (peak-to-peak). The resonator's quality factor varies in the acceptable range of 684-342 for these conditions. The measured and simulated results reveal that this approach may become a promising tuning technology particularly in demanding applications where conventional solid-state techniques are ineffective due to temperature, power, or linearity limitations.

Original languageEnglish (US)
Title of host publication2016 IEEE MTT-S International Microwave Symposium, IMS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509006984
StatePublished - Aug 9 2016
Event2016 IEEE MTT-S International Microwave Symposium, IMS 2016 - San Francisco, United States
Duration: May 22 2016May 27 2016

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X


Other2016 IEEE MTT-S International Microwave Symposium, IMS 2016
Country/TerritoryUnited States
CitySan Francisco


  • Electron number density
  • evanescent-mode cavity resonator
  • plasma jet
  • tunable attenuation

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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