Low-temperature growth of polycrystalline Si and Ge films by photolytic laser-induced CVD

J. F. Osmundsen, D. Lubben, C. C. Abele, J. E. Greene, J. G. Eden

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish (US)
Article numberWE4
JournalOptics InfoBase Conference Papers
StatePublished - 1982
EventConference on Lasers and Electro-Optics, CLEO 1982 - Phoenix, United States
Duration: Apr 14 1982Apr 16 1982

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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