Low-temperature growth of polycrystalline Si and Ge films by photolytic laser-induced CVD

J. F. Osmundsen, D. Lubben, C. C. Abele, J. E. Greene, J. G. Eden

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Article number	WE4
Journal	Optics InfoBase Conference Papers
State	Published - 1982
Event	Conference on Lasers and Electro-Optics, CLEO 1982 - Phoenix, United States Duration: Apr 14 1982 → Apr 16 1982

ASJC Scopus subject areas

@article{06181dec332d4a929182f2317e326acc,

title = "Low-temperature growth of polycrystalline Si and Ge films by photolytic laser-induced CVD",

author = "Osmundsen, {J. F.} and D. Lubben and Abele, {C. C.} and Greene, {J. E.} and Eden, {J. G.}",

year = "1982",

language = "English (US)",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

note = "Conference on Lasers and Electro-Optics, CLEO 1982 ; Conference date: 14-04-1982 Through 16-04-1982",

}

TY - JOUR

T1 - Low-temperature growth of polycrystalline Si and Ge films by photolytic laser-induced CVD

AU - Osmundsen, J. F.

AU - Lubben, D.

AU - Abele, C. C.

AU - Greene, J. E.

AU - Eden, J. G.

PY - 1982

Y1 - 1982

UR - http://www.scopus.com/inward/record.url?scp=85136812124&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85136812124&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:85136812124

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - WE4

T2 - Conference on Lasers and Electro-Optics, CLEO 1982

Y2 - 14 April 1982 through 16 April 1982

ER -