Low-temperature growth of polycrystalline Si and Ge films by photolytic laser-induced CVD

J. F. Osmundsen, D. Lubben, C. C. Abele, J. E. Greene, J. G. Eden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 1982
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781557528209
StatePublished - 1982
EventConference on Lasers and Electro-Optics, CLEO 1982 - Phoenix, United States
Duration: Apr 14 1982Apr 16 1982

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 1982
Country/TerritoryUnited States
CityPhoenix
Period4/14/824/16/82

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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