Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate

Ruochen Lu, Yansong Yang, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5% at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of the S0 waves is 0.0126 dB/ μ m. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.

Original languageEnglish (US)
Article number9146571
Pages (from-to)2731-2737
Number of pages7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume67
Issue number12
DOIs
StatePublished - Dec 2020

Keywords

  • Acoustic delay line (ADL)
  • S0 mode
  • lithium niobate
  • microelectromechanical systems (MEMS)
  • piezoelectricity
  • power flow angle
  • wave focusing transducer

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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