Abstract
In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5% at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of the S0 waves is 0.0126 dB/ μ m. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.
Original language | English (US) |
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Article number | 9146571 |
Pages (from-to) | 2731-2737 |
Number of pages | 7 |
Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Volume | 67 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2020 |
Keywords
- Acoustic delay line (ADL)
- S0 mode
- lithium niobate
- microelectromechanical systems (MEMS)
- piezoelectricity
- power flow angle
- wave focusing transducer
ASJC Scopus subject areas
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering