Low-loss and wide-band acoustic delay lines using x-cut and y-cut lithium niobate piezoelectric thin films

Ruochen Lu (Inventor), Tomas Manzaneque Garcia (Inventor), Yansong Yang (Inventor), Songbin Gong (Inventor)

Research output: Patent

Abstract

A piezoelectric thin film (PTF) is located above a carrier substrate. The PTF may be X-cut LiNbO3 thin film adapted to propagate an acoustic wave in at least one of a first mode excited by an electric field oriented in a longitudinal direction along a length of the PTF or a second mode excited by the electric field oriented at least partially in a thickness direction of the PTF. A first interdigitated transducer (IDT) is disposed on a first end of the PTF. The first IDT is to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave. A second IDT is disposed on a second end of the PTF with a gap between the second IDT and the first IDT. The second IDT is to convert the acoustic wave into a second electromagnetic signal.
Original languageEnglish (US)
U.S. patent number11942920
Filing date10/16/20
StatePublished - Mar 26 2024

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