Low-Loss and High Power Handling Acoustic Delay Lines Using Thin-Film Lithium Niobate on Sapphire

Ruochen Lu, Yansong Yang, Ahmed E. Hassanien, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we present the first group of GHz low-loss, wideband, and high power handling delay lines (ADLs) using a thin-film lithium niobate (LiNbO3) on sapphire platform. The ADLs leverage a single-phase unidirectional transducer (SPUDT) to efficiently excite the shear horizontal surface acoustic wave (SH-SAW) in the film stack. The fabricated miniature SH-SAW ADL at 1.1 GHz shows a low insertion loss (IL) of 2.8 dB, a wide fractional bandwidth (FBW) of 6.14%, and a fast phase velocity of 5127 m/s. The device also features a high 1 dB compression point (P1dB) of 30.4 dBm. The propagation characteristics of SH-SAW are extracted, with a group velocity of 4747 m/s and a propagation loss of 6.73 dB/mm. The simultaneously low-loss and high power handling illustrate the great potential of LiNbO3-on-sapphire for RF and cross-domain applications at GHz.

Original languageEnglish (US)
Title of host publication2021 IEEE MTT-S International Microwave Symposium, IMS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages270-273
Number of pages4
ISBN (Electronic)9781665403078
DOIs
StatePublished - Jun 7 2021
Event2021 IEEE MTT-S International Microwave Symposium, IMS 2021 - Virtual, Atlanta, United States
Duration: Jun 7 2021Jun 25 2021

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2021-June
ISSN (Print)0149-645X

Conference

Conference2021 IEEE MTT-S International Microwave Symposium, IMS 2021
Country/TerritoryUnited States
CityVirtual, Atlanta
Period6/7/216/25/21

Keywords

  • Acoustic devices
  • SH-SAW
  • delay lines
  • lithium niobate
  • microelectromechanical systems
  • piezoelectric devices
  • transversal filters

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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