Abstract
In this work, we present the low-loss acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in 128° Y-cut lithium niobate thin films. The ADLs use a single-phase unidirectional transducer (SPUDT) design with a feature size of quarter acoustic wavelength. The design space is analytically explored and experimentally validated. The fabricated miniature A1 ADLs with a feature size of 0.45 μ \text{m} show a high operating frequency at 5.4 GHz, a minimum insertion loss (IL) of 3 dB, a fractional bandwidth (FBW) of 1.6%, and a small footprint of 0.0074 mm2. The low IL and high operating frequency have significantly surpassed the state-of-the-art performance of ADLs. The propagation characteristics of A1 acoustic waves have also been extracted. The demonstrated designs can lead to low-loss and high-frequency transversal filters for future 5G applications in the sub-6-GHz bands.
Original language | English (US) |
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Article number | 9201380 |
Pages (from-to) | 541-550 |
Number of pages | 10 |
Journal | IEEE Transactions on Microwave Theory and Techniques |
Volume | 69 |
Issue number | 1 |
DOIs | |
State | Published - Jan 2021 |
Keywords
- 5G mobile communication
- Acoustic devices
- delay lines
- microelectromechanical systems
- piezoelectric devices
- thin-film devices
- transversal filters
ASJC Scopus subject areas
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering