The low energy electron microscopy (LEEM) at the University of Illinois has been in service for four years. This paper discusses a research project that occupies about half the effort on the machine. It focuses on the properties of refractory metals at elevated temperatures, and particularly the surface and bulk behavior of epitaxial thin films grown by molecular beam epitaxy.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Nov 2002|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering