Low actuation voltage RF MEMS switches with signal frequencies from 0.25GHz to 40GHz

Shyh Chiang Shen, Milton Feng

Research output: Contribution to journalArticle


A novel low-voltage radio-frequency microelectromechanical system (RF MEMS) switch is reported. The device switching voltages are 14-17 volts. When the device is operated in an 'on' state, an insertion loss of less than 0.5 dB with a return loss of -15 dB at 40GHz was measured. When operated in its 'off' state, an isolation of better than 27 dB over the frequency band from 0.25GHz to 40GHz was achieved. The RF MEMS switch equivalent circuit model shows that the 'on' resistance is 0.3 Ω and the 'off' capacitance is 90fF, which results in a figure of merit of 6000GHz.

Original languageEnglish (US)
Pages (from-to)689-692
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 1999


ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this