Low actuation voltage microelectromechanical device and method of manufacture

Milton Feng (Inventor), Shyh-Chiang Shen (Inventor)

Research output: Patent


A method and apparatus for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a position of a conductive pad. The switch contains waveguides including the signal line and at least one ground plane. The conductive pad responds to an actuation voltage to electrically connect the signal line and the ground planes when the metal pad is located in a relaxed position. When not located in the relaxed position, the switch breaks the connection to allow signals to flow through the signal line unimpeded. Brackets guide the pad as the pad moves between the relaxed position and a stimulated position due to the actuation voltage, without substantially deforming the conductive pad.
Original languageEnglish (US)
U.S. patent number6143997
Filing date6/4/99
StatePublished - Nov 7 2000


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