Localized heating and thermal characterization of high electrical resistivity silicon-on-insulator sensors using nematic liquid crystals

Oguz H. Elibol, Bobby Reddy, Rashid Bashir

Research output: Contribution to journalArticle

Abstract

We present a method for localized heating of media at the surface of silicon-on-insulator field-effect sensors via application of an ac voltage across the channel and the substrate and compare this technique with standard Joule heating via the application of dc voltage across the source and drain. Using liquid crystals as the medium to enable direct temperature characterization, our results show that under comparable bias conditions, heating of the medium using an alternating field results in a greater increase in temperature with a higher spatial resolution. These features are very attractive as devices are scaled to the nanoscale dimensions.

Original languageEnglish (US)
Article number131908
JournalApplied Physics Letters
Volume93
Issue number13
DOIs
StatePublished - Oct 13 2008

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liquid crystals
insulators
electrical resistivity
heating
sensors
silicon
Joule heating
electric potential
spatial resolution
temperature
high resolution

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Localized heating and thermal characterization of high electrical resistivity silicon-on-insulator sensors using nematic liquid crystals. / Elibol, Oguz H.; Reddy, Bobby; Bashir, Rashid.

In: Applied Physics Letters, Vol. 93, No. 13, 131908, 13.10.2008.

Research output: Contribution to journalArticle

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