Local Gating of Carbon Nanotubes

M. J. Biercuk, N. Mason, C. M. Marcus

Research output: Contribution to journalArticle

Abstract

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (∼150 nm x 10 nm). Prior to tube growth, several finger gates were patterned lithographically and subsequently coated with a patterned high-κ dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have an effect that is distinct from that of a global backgate.

Original languageEnglish (US)
Pages (from-to)1-4
Number of pages4
JournalNano letters
Volume4
Issue number1
DOIs
StatePublished - Jan 1 2004
Externally publishedYes

Fingerprint

Carbon Nanotubes
Chemical vapor deposition
Carbon nanotubes
carbon nanotubes
Atomic layer deposition
Single-walled carbon nanotubes (SWCN)
Electrostatics
vapor deposition
Catalysts
atomic layer epitaxy
electrostatics
tubes
catalysts
Temperature

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

Cite this

Local Gating of Carbon Nanotubes. / Biercuk, M. J.; Mason, N.; Marcus, C. M.

In: Nano letters, Vol. 4, No. 1, 01.01.2004, p. 1-4.

Research output: Contribution to journalArticle

Biercuk, MJ, Mason, N & Marcus, CM 2004, 'Local Gating of Carbon Nanotubes', Nano letters, vol. 4, no. 1, pp. 1-4. https://doi.org/10.1021/nl034696g
Biercuk, M. J. ; Mason, N. ; Marcus, C. M. / Local Gating of Carbon Nanotubes. In: Nano letters. 2004 ; Vol. 4, No. 1. pp. 1-4.
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