Local Gating of Carbon Nanotubes

M. J. Biercuk, N. Mason, C. M. Marcus

Research output: Contribution to journalArticle

Abstract

Local effects of multiple electrostatic gates placed beneath carbon nanotubes grown by chemical vapor deposition (CVD) are reported. Single-walled carbon nanotubes were grown by CVD from Fe catalyst islands across thin Mo "finger gates" (∼150 nm x 10 nm). Prior to tube growth, several finger gates were patterned lithographically and subsequently coated with a patterned high-κ dielectric using low-temperature atomic layer deposition. Transport measurements demonstrate that local finger gates have an effect that is distinct from that of a global backgate.

Original languageEnglish (US)
Pages (from-to)1-4
Number of pages4
JournalNano letters
Volume4
Issue number1
DOIs
StatePublished - Jan 1 2004
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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