Lithography-Free, Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer

Jing Jiang, Zhida Xu, Jiahao Lin, Gang Logan Liu

Research output: Contribution to journalArticle

Abstract

A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%, and increase the responsivity by 25.7%. This low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices.

Original languageEnglish (US)
Article number4019864
JournalJournal of Sensors
Volume2016
DOIs
StatePublished - Jan 1 2016

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Instrumentation
  • Electrical and Electronic Engineering

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