@inproceedings{984e4b7976e74b609b91844d06a8a0b8,
title = "Lithium niobate MEMS devices and subsystems for radio frequency signal processing",
abstract = "This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.",
keywords = "Internet of Things, Lithium niobate, MEMS, RF, VCO",
author = "Songbin Gong and Song, {Yong Ha} and Tomas Manzaneque and Ruochen Lu and Yansong Yang and Ali Kourani",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 ; Conference date: 06-08-2017 Through 09-08-2017",
year = "2017",
month = sep,
day = "27",
doi = "10.1109/MWSCAS.2017.8052856",
language = "English (US)",
series = "Midwest Symposium on Circuits and Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "45--48",
booktitle = "2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017",
address = "United States",
}