Lithium niobate MEMS devices and subsystems for radio frequency signal processing

Songbin Gong, Yong Ha Song, Tomas Manzaneque, Ruochen Lu, Yansong Yang, Ali Kourani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.

Original languageEnglish (US)
Title of host publication2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages45-48
Number of pages4
ISBN (Electronic)9781509063895
DOIs
StatePublished - Sep 27 2017
Event60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 - Boston, United States
Duration: Aug 6 2017Aug 9 2017

Publication series

NameMidwest Symposium on Circuits and Systems
Volume2017-August
ISSN (Print)1548-3746

Other

Other60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017
CountryUnited States
CityBoston
Period8/6/178/9/17

Keywords

  • Internet of Things
  • Lithium niobate
  • MEMS
  • RF
  • VCO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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