Lithium niobate lateral overtone resonators for low power frequency-hopping applications

Ruochen Lu, Tomas Manzaneque, Yansong Yang, Ali Kourani, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work reports the first lithium niobate (LiNbO3) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform kt2. The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO3 resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO3 LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.

Original languageEnglish (US)
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages751-754
Number of pages4
ISBN (Electronic)9781538647820
DOIs
StatePublished - Apr 24 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: Jan 21 2018Jan 25 2018

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period1/21/181/25/18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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