Lithium niobate lateral overtone resonators for low power frequency-hopping applications

Ruochen Lu; Tomas Manzaneque; Yansong Yang; Ali Kourani; Songbin Gong

doi:10.1109/MEMSYS.2018.8346664

Lithium niobate lateral overtone resonators for low power frequency-hopping applications

Ruochen Lu, Tomas Manzaneque, Yansong Yang, Ali Kourani, Songbin Gong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work reports the first lithium niobate (LiNbO₃) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform k_t². The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO₃ resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO₃ LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.

Original language	English (US)
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	751-754
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346664
State	Published - Apr 24 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: Jan 21 2018 → Jan 25 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Other

Other	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	1/21/18 → 1/25/18

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2018.8346664

Library availability

Discover UIUC Full Text

Cite this

Lu, R., Manzaneque, T., Yang, Y., Kourani, A., & Gong, S. (2018). Lithium niobate lateral overtone resonators for low power frequency-hopping applications. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 751-754). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346664

Lithium niobate lateral overtone resonators for low power frequency-hopping applications. / Lu, Ruochen; Manzaneque, Tomas; Yang, Yansong et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 751-754 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lu, R, Manzaneque, T, Yang, Y, Kourani, A & Gong, S 2018, Lithium niobate lateral overtone resonators for low power frequency-hopping applications. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 751-754, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 1/21/18. https://doi.org/10.1109/MEMSYS.2018.8346664

Lu R, Manzaneque T, Yang Y, Kourani A, Gong S. Lithium niobate lateral overtone resonators for low power frequency-hopping applications. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 751-754. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346664

Lu, Ruochen ; Manzaneque, Tomas ; Yang, Yansong et al. / Lithium niobate lateral overtone resonators for low power frequency-hopping applications. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 751-754 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This work reports the first lithium niobate (LiNbO3) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform kt2. The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO3 resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO3 LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.",

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AB - This work reports the first lithium niobate (LiNbO3) lateral overtone bulk acoustic resonator (LOBAR) with a high figure-of-merit (FoM) for each overtone. We exploit electrode offset as a key parameter to excite both the even-order and the odd-order modes with uniform kt2. The fabricated device shows Qs (1966, 1215, and 1513) among the highest reported for LiNbO3 resonators at the equally-spaced resonances (446.4, 599.8, and 757.3 MHz). As a result, high FoMs of 83.6, 102.6 and 63.1 have been obtained simultaneously for aforementioned resonances. These FoMs significantly surpass those of the state-of-the-art overtone devices. With these qualities, frequency-hopping oscillators based on LiNbO3 LOBARs can be enabled for low power and phase-continuous frequency-hopping applications.

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Lithium niobate lateral overtone resonators for low power frequency-hopping applications

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