Linear control rules for production control of semiconductor fabs

C. Roger Glassey, Jeyaveerasingam George Shanthikumar, Sridhar Seshadri

Research output: Contribution to journalArticlepeer-review

Abstract

We consider the problem of reducing the cycle time required for producing wafers at a given rate in high-volume single-product semiconductor fabs. Based on theoretical results, we propose a new method of input control that uses intersecting hyperplanes to decide when to release a new lot into the wafer fab. The release control rules constructed thus are said to belong to the class of linear control rules. We provide numerical examples to demonstrate that our method gives nearly optimal results for flowline and probabilistic reentrant flowline models. We then propose the linear control rule called descending control (DEC) and give a hybrid simulation-optimization procedure for determining DEC rules in real-life settings. We provide numerical results for the HP development fab model of Wein [31].

Original languageEnglish (US)
Pages (from-to)536-549
Number of pages14
JournalIEEE Transactions on Semiconductor Manufacturing
Volume9
Issue number4
DOIs
StatePublished - 1996
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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