Linear microplasmas have been produced within rectangular channels, 75 × 75 μm2 in cross section and 7 cm in length. Arrays of such channels have been fabricated in single sheets of 127-μm-thick aluminum foil by a photolithographic step and an electrochemical process. Arrays comprising 20 parallel channels have been operated in the rare gases, N2, and air at pressures in the 100-760-Torr interval.
- microcavity plasmas
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics