@article{5b0402151c5f438f81900c49ed2f48c4,
title = "Linear arrays of microchannel plasmas in monolithic Al/Al2O 3 sheets",
abstract = "Linear microplasmas have been produced within rectangular channels, 75 × 75 μm2 in cross section and 7 cm in length. Arrays of such channels have been fabricated in single sheets of 127-μm-thick aluminum foil by a photolithographic step and an electrochemical process. Arrays comprising 20 parallel channels have been operated in the rare gases, N2, and air at pressures in the 100-760-Torr interval.",
keywords = "Arrays, microcavity plasmas, microchannels, microplasmas",
author = "Kim, {K. S.} and Park, {S. J.} and Eden, {J. G.}",
note = "Funding Information: Manuscript received December 6, 2010; revised June 16, 2011; accepted June 26, 2011. Date of current version November 9, 2011. This work was supported by the AFOSR. The authors are with the Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165563 Fig. 1. (Top) Partial schematic diagram (in cross section) of an Al/Al2O3 microchannel array fabricated in a single Al foil. The diagram shows a closed channel structure with a glass window. (Bottom) Optical micrograph of several microchannels and their associated electrodes.",
year = "2011",
month = nov,
doi = "10.1109/TPS.2011.2165563",
language = "English (US)",
volume = "39",
pages = "2698--2699",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "11 PART 1",
}