Linear arrays of microchannel plasmas in monolithic Al/Al2O 3 sheets

K. S. Kim, S. J. Park, J. G. Eden

Research output: Contribution to journalArticle

Abstract

Linear microplasmas have been produced within rectangular channels, 75 × 75 μm2 in cross section and 7 cm in length. Arrays of such channels have been fabricated in single sheets of 127-μm-thick aluminum foil by a photolithographic step and an electrochemical process. Arrays comprising 20 parallel channels have been operated in the rare gases, N2, and air at pressures in the 100-760-Torr interval.

Original languageEnglish (US)
Article number6051520
Pages (from-to)2698-2699
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume39
Issue number11 PART 1
DOIs
StatePublished - Nov 1 2011

Keywords

  • Arrays
  • microcavity plasmas
  • microchannels
  • microplasmas

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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