Lessons learned from nanoscale specimens tested by MEMS-based apparatus

Mohamed Elhebeary, M. Taher A. Saif

Research output: Contribution to journalReview articlepeer-review


The last two decades were marked by the innovative synthesis of nanomaterials and devices. The success of these devices hinges on the mechanical properties of nanomaterials and an understanding of their deformation and failure mechanisms. Many novel testing techniques have been developed to test materials at small scale. This paper reviews the state-of-the-art microelectromechanical systems (MEMS) apparatus developed to characterize materials at nanoscale, and the key insights gained on structure-property relations of materials through these characterizations. Finally, new applications of MEMS in testing living materials, such as tissues and cells, for disease diagnosis and prognosis are discussed.

Original languageEnglish (US)
Article number243001
JournalJournal of Physics D: Applied Physics
Issue number24
StatePublished - May 19 2017


  • MEMS
  • mechanical characterization
  • microelectromechanical systems
  • micromechanics
  • nanoscale mechanical testing
  • nanowires
  • thin flms

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films


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