Length-scale dependence of elasticity in nanocrystalline materials for mems applications

M. A. Haque, M. T.A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Length-scale dependence of the elastic properties of thin film materials bears significance in the design of Micro-electronic and Micro-electro- mechanical (MEMS) systems , which are usually desired to operate in the elastic range under different operational loading conditions. In this study, we investigate elastic properties of freestanding ultra-high purity Aluminum and Gold thin films with thickness varying from 30 to 350 nanometers. Uniaxial tension test results indicate that for truly polycrystalline films , Young's modulus can be as low as 85% and 60% of the bulk value for Aluminum and Gold respectively with average grain size of 20 nanometers. We present, for the first time, the evidence of non-linear elasticity with total strain up to 1.0% in nanocrystalline thin films and attempt to provide fundamental understanding of the length-scale dependence of elasticity in thin films with a simple model based on inter-atomic force-distance relationships.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Number of pages4
ISBN (Print)0791836428, 9780791836422
StatePublished - 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings


  • Elasticity
  • MEMS
  • Size effect
  • Thin films

ASJC Scopus subject areas

  • Mechanical Engineering


Dive into the research topics of 'Length-scale dependence of elasticity in nanocrystalline materials for mems applications'. Together they form a unique fingerprint.

Cite this