@inproceedings{23414e9fc08b4acbb0be11253ffe30ed,
title = "Length-scale dependence of elasticity in nanocrystalline materials for mems applications",
abstract = "Length-scale dependence of the elastic properties of thin film materials bears significance in the design of Micro-electronic and Micro-electro- mechanical (MEMS) systems , which are usually desired to operate in the elastic range under different operational loading conditions. In this study, we investigate elastic properties of freestanding ultra-high purity Aluminum and Gold thin films with thickness varying from 30 to 350 nanometers. Uniaxial tension test results indicate that for truly polycrystalline films , Young's modulus can be as low as 85% and 60% of the bulk value for Aluminum and Gold respectively with average grain size of 20 nanometers. We present, for the first time, the evidence of non-linear elasticity with total strain up to 1.0% in nanocrystalline thin films and attempt to provide fundamental understanding of the length-scale dependence of elasticity in thin films with a simple model based on inter-atomic force-distance relationships.",
keywords = "Elasticity, MEMS, Size effect, Thin films",
author = "Haque, {M. A.} and Saif, {M. T.A.}",
year = "2002",
doi = "10.1115/IMECE2002-33297",
language = "English (US)",
isbn = "0791836428",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",
publisher = "American Society of Mechanical Engineers (ASME)",
pages = "161--164",
booktitle = "Microelectromechanical Systems",
}