Layout optimization and template pattern verification for directed self-assembly (DSA)

Zigang Xiao, Daifeng Guo, Martin D.F. Wong, He Yi, Maryann C. Tung, H. S.Phil IP Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Layout optimization and template pattern verification for directed self-assembly (DSA)'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science