Layout optimization and template pattern verification for directed self-assembly (DSA)

Zigang Xiao, Daifeng Guo, Martin D.F. Wong, He Yi, Maryann C. Tung, H. S.Phil IP Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recently, block copolymer directed self-assembly (DSA) has demonstrated great advantages in patterning contacts/vias for the 7 nm technology node and beyond. The high throughput and low process cost of DSA makes it the most promising candidate in patterning tight pitched dense patterns for the next generation lithography. Since DSA is very sensitive to the shapes and distributions of the guiding templates, it is necessary to develop new EDA algorithms and tools to address the patterning rules and constraints of the process. This paper presents a set of DSA-aware optimization techniques targeting the most urgent problems for DSA technology, including layout optimization and template pattern verification.

Original languageEnglish (US)
Title of host publication2015 52nd ACM/EDAC/IEEE Design Automation Conference, DAC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781450335201
DOIs
StatePublished - Jul 24 2015
Event52nd ACM/EDAC/IEEE Design Automation Conference, DAC 2015 - San Francisco, United States
Duration: Jun 7 2015Jun 11 2015

Publication series

NameProceedings - Design Automation Conference
Volume2015-July
ISSN (Print)0738-100X

Other

Other52nd ACM/EDAC/IEEE Design Automation Conference, DAC 2015
CountryUnited States
CitySan Francisco
Period6/7/156/11/15

Keywords

  • Directed Self-Assembly
  • Layout Optimization
  • Machine Learning
  • Template Verification

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modeling and Simulation

Fingerprint Dive into the research topics of 'Layout optimization and template pattern verification for directed self-assembly (DSA)'. Together they form a unique fingerprint.

  • Cite this

    Xiao, Z., Guo, D., Wong, M. D. F., Yi, H., Tung, M. C., & Wong, H. S. P. IP. (2015). Layout optimization and template pattern verification for directed self-assembly (DSA). In 2015 52nd ACM/EDAC/IEEE Design Automation Conference, DAC 2015 [7167384] (Proceedings - Design Automation Conference; Vol. 2015-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1145/2744769.2747934