TY - GEN
T1 - Laterally vibrating lithium niobate MEMS resonators with high electromechanical coupling and Quality factor
AU - Gong, Songbin
AU - Piazza, Gianluca
PY - 2012
Y1 - 2012
N2 - This paper reports on a new type of laterally vibrating micro-resonators (LVRs) enabled by ion sliced X-cut Lithium Niobate thin film and micro-machining. In operation, the device is excited into lateral vibrations, thus allowing the center frequency to be determined by the lithography-defined dimensions of the electrodes. This configuration enables monolithic multi-frequency solutions for future wireless communication. The designed devices have shown a high electromechanical coupling (kt2) of 11%-the highest demonstrated for MEMS LVRs. Device orientation was also varied to investigate its impact on kt2 and experimental data has shown good agreement with theoretical predictions. The Quality factor of these devices has also shown a dependence on the orientation, ranging from 350 to 1100.
AB - This paper reports on a new type of laterally vibrating micro-resonators (LVRs) enabled by ion sliced X-cut Lithium Niobate thin film and micro-machining. In operation, the device is excited into lateral vibrations, thus allowing the center frequency to be determined by the lithography-defined dimensions of the electrodes. This configuration enables monolithic multi-frequency solutions for future wireless communication. The designed devices have shown a high electromechanical coupling (kt2) of 11%-the highest demonstrated for MEMS LVRs. Device orientation was also varied to investigate its impact on kt2 and experimental data has shown good agreement with theoretical predictions. The Quality factor of these devices has also shown a dependence on the orientation, ranging from 350 to 1100.
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U2 - 10.1109/ULTSYM.2012.0263
DO - 10.1109/ULTSYM.2012.0263
M3 - Conference contribution
AN - SCOPUS:84882302533
SN - 9781467345613
T3 - IEEE International Ultrasonics Symposium, IUS
SP - 1051
EP - 1054
BT - 2012 IEEE International Ultrasonics Symposium, IUS 2012
T2 - 2012 IEEE International Ultrasonics Symposium, IUS 2012
Y2 - 7 October 2012 through 10 October 2012
ER -