Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

Yansong Yang, Liuqing Gao, Ruochen Lu, Songbin Gong

Research output: Contribution to journalArticlepeer-review


This work presents an improved design that exploits dispersion matching to suppress the spurious modes in the lithium niobate first-order antisymmetric (A1) Lamb wave mode resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loadings of electrodes. In this article, the dispersion matchings of the A1 mode in lithium niobate based on different metals are analytically modeled and validated with finite-element analysis. The fabricated devices exhibit spurious-free responses with a quality factor of 692 and an electromechanical coupling coefficient of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

Original languageEnglish (US)
Article number9312614
Pages (from-to)1930-1937
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number5
StatePublished - May 2021


  • 5G wireless communications
  • Antisymmetric Lamb waves
  • Dispersion
  • Electrodes
  • Internet of Things
  • Lithium niobate
  • lithium niobate
  • Loading
  • MEMS resonators
  • Reflection
  • Resonant frequency
  • Resonators
  • Spurious modes suppression
  • antisymmetric Lamb waves
  • internet of things
  • spurious modes suppression

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering
  • Acoustics and Ultrasonics


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