Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

Yansong Yang, Liuqing Gao, Ruochen Lu, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

This work presents an improved design that exploits dispersion matching to suppress the spurious modes in the lithium niobate first-order antisymmetric (A1) Lamb wave mode resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loadings of electrodes. In this article, the dispersion matchings of the A1 mode in lithium niobate based on different metals are analytically modeled and validated with finite element analysis. The fabricated devices exhibit spurious-free responses with a quality factor of 692 and an electromechanical coupling coefficient of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

Keywords

  • 5G wireless communications
  • Antisymmetric Lamb waves
  • Dispersion
  • Electrodes
  • Internet of Things
  • Lithium niobate
  • lithium niobate
  • Loading
  • MEMS resonators
  • Reflection
  • Resonant frequency
  • Resonators
  • Spurious modes suppression

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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