Lateral scaling of 0.25 μm InP/InGaAs SHBTs with InAs emitter cap

W. Hafez, M. Feng

Research output: Contribution to journalArticlepeer-review

Abstract

InP/InGaAs single heterojunction bipolar transistors (SHBTs) have been fabricated using a highly doped InAs emitter cap for a 50% reduction in emitter resistance to allow aggressive lateral scaling to increase fMAX- Type I InP SHBTs have been fabricated with 0.25 μm emitter widths and achieve fMAX values as high as 478 GHz on a laterally scaled LE=1 μm device, and maintain breakdown voltages greater than 4 V.

Original languageEnglish (US)
Pages (from-to)1151-1153
Number of pages3
JournalElectronics Letters
Volume40
Issue number18
DOIs
StatePublished - Sep 2 2004

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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