Abstract
A novel method for fabricating photonic crystal membrane light emitting diodes is presented. The device employs a transverse diode structure and injects carriers laterally through a photonic crystal patterned at the p-n junction within a membrane. Details of the fabrication process as well as electrical and optical characteristics of the devices are presented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 359-364 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
| Volume | 28 |
| Issue number | 2 |
| DOIs | |
| State | Published - 2010 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry